Subcommittee1-Materials
Number: 7
Subcommittee2-PTM
Number: 5
Subcommittee3-SemiDevices
Number: 6
Subcommittee4-PED
Number: 13
Subcommittee5-ModSim
Number: 14
Subcommittee6-Reliability
Number: 10
Subcommittee7-PHI
Number: 4
Subcommittee8-YM
Number: 3
Subcommittee9-Memory
Number: 8
Subcommittee10-SMB
Number: 13
Subcommittee11-PID
Number: 4
Subcommittee12-FWE
Number: 6
Subcommittee13-Nanotech
Number: 6
Subcommittee14-Disruptive
Number: 14